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Home > Professor > International Paper     
Effect of the Carrier Gas Flow Rate on the Microstructure Evolution and the Generation of the Charged Nanoparticles During Silicon Chemical Vapor Deposition
 
관련링크 : http://www.ingentaconnect.com/content/asp/jnn/2013/00000013/00000010/a… [278]
첨부파일 : s106.pdf (2.8M) [0]
Woong-Kyu Youn, Chan-Soo Kim, and Nong-Moon Hwang
Journal of Nanoscience and Nanotechnology Vol. 13, 7127–7130, 2013
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서울 관악구 관악로 1 서울대학교, 재료공학부 31동 314호 박막및미세조직실험실 (08826)
Thin Films and Microstructure Lab., 31-314 Department of Materials Science and Engineering, Seoul National Univ., 1 Gwanak-ro, Gwanak-gu, Seoul, Korea (Zip 08826)
TEL +82-2-880-9152 (31-314), +82-2-880-8862 (30-304), +82-2-880-5511 (131-404)

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